Question

Write a short note on inductively coupled plasma.

08 Mar 2018
Answer :
Word Count : 473

Image ignouacademy-com--p-inductively-48713                       Image ignouacademy-com--p-coupled-66203

An inductively coupled plasma (ICP) or transformer coupled plasma (TCP) is a type of plasma source in which the energy is supplied by electric currents which are produced by electromagnetic induction, that is, by time-varying magnetic fields.

There are three types of ICP geometries: planar  cylindrical and half-toroidal

Conventional Plasma Inductors

In planar geometry, the electrode is a length of flat metal wound like a spiral (or coil). In cylindrical geometry, it is like a helical spring. In half-toroidal geometry, it is toroidal solenoid cut along its main diameter to two equal halves.

When a time-varying electric current is passed through the coil, it creates a time-varying magnetic field around it, with flux

Image ignouacademy-com--p-note-79094

where r is the distance to the center of coil (and of the quartz tube).

According to

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